A compact micropositioner for use in ultra high vacuum, Rev. Sci. Instrum. 64 2687 (1993).

We have designed and built a low profile compact micropositioner for use in air or ultrahigh vacuum. The dimensions are 3.1 cm x 1.9 cm x 0.75 cm with a 1.4 cm range of motion. The device is actuated by two piezoelectric tubes, and utilizes both stick-slip and sequential clamping to attain linear motion in one dimension. For motion in two dimensions the flat profile allows two units to be stacked. The micropositioner is capable of climbing an incline of 30° while carrying a 17 gm load. It is driven forward by staggered 0 to 250V signals with a fast rise time and slow decay time. We obtained step sizes from 30 nm to 400 nm with standard deviation less than 15 nm, and have demonstrated a maximum average velocity of 0.14 mm/sec.