Hot STM Labs
CVD & Nanofabrication
Selective nanoscale Pd Physical Vapor Deposition using the Atomic Hydrogen Resist
Selective nanoscale growth of Ti using
Chemical Vapor Deposition
of TiCl
4
and Atomic Hydrogen Resist
Al Nanolithography using Chemical Vapor Deposition and Atomic Hydrogen Resist
Initial Stages of Al CVD Growth on Si(001) using Dimethylaluminum Hydride
The Adsorption of TiCl
4
on the Si(001) Surface
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