Hot STM Labs
CVD & Nanofabrication


Selective nanoscale Pd Physical Vapor Deposition using the Atomic Hydrogen Resist
Selective nanoscale growth of Ti using Chemical Vapor Deposition of TiCl4 and Atomic Hydrogen Resist
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Al Nanolithography using Chemical Vapor Deposition and Atomic Hydrogen Resist
Initial Stages of Al CVD Growth on Si(001) using Dimethylaluminum Hydride
The Adsorption of TiCl4 on the Si(001) Surface

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